Vector Network Analyzer

The Fraunhofer Institute for Microstructure of Materials and Systems IMWS researches the application behaviour, reliability, safety and lifetime of innovative materials in components and systems. The Business Unit “Electronic Materials and Components” of Fraunhofer IMWS supports industry and research partners by its internationally recognized expertise in failure analyses of electronic components. Fraunhofer IMWS will enhance its capabilities for advanced failure analysis and material characterization to support the ramp-up of new heterogeneous integration technologies addressing the manufacturing and reliability challenges.
To enhance this novel e-beam prober system, which includes an electron beam-based analysis tool with extremely fast beam operation, a time-domain reflectometry measurement setup is required to enable advanced analysis of complex transmission lines within integrated circuits. The system shall comprise a vector network analyzer (VNA) with integrated time-domain reflectometry (TDR) analysis based on measured S-parameters. It shall support frequency-domain characterization and time-domain analysis of reflection responses and impedance profiles. Particular emphasis is placed on time resolution, measurement repeatability, calibration, and correction of the effects of cables, adapters, and test fixtures.